Kumatshini welithography wokwenziwa kwetshiphu, impazamo engabonakaliyo inokutshabalalisa iiwafers ezixabisa izigidi zeerandi. Yonke i-micrometer yokufuduswa apha ibalulekile kwimpumelelo okanye ekusileleni kweesekethe ze-nanoscale, kwaye undoqo oxhasa lo mdaniso uchanekileyo ngumlinganiswa wethu namhlanje:izinto ze-silicon carbide ceramic- kufana namandla azinzisayo kwihlabathi le-microscopic, ukugada indlela yokuphila echanekileyo yoshishino lwanamhlanje lwe-semiconductor kwiimeko ezinzima.
1, Xa iiCeramics Dibana neChips: Umngeni ogqibeleleyo wokuchaneka
Amacandelo e-ceramic achanekileyo oomatshini be-lithography kufuneka badlale iindima ezintathu ngaxeshanye:
Isiseko esizinzile kakhulu: simelana neetoni ezininzi zoxinzelelo ngexesha lokuvezwa kodwa sihlala singashukumi.
Umlindi wobushushu: ugcina uzinzo lwe-thermal phantsi komothuko ophezulu we-laser.
Vacuum Guardian: igcina inqanaba leathom elithambileyo iminyaka elishumi kwindawo yokungcangcazela.
Izinto zetsimbi zendabuko ziya kuvelisa "i-micro tremors" ngenxa yokwandiswa kwe-thermal kunye nokunciphisa, ngelixa izinto ze-polymer zinzima ukumelana nokubola kwe-plasma. I-Silicon carbide ceramics, kunye nesakhiwo sayo esiyingqayizivele se-crystal, ifezekisa ibhalansi egqibeleleyo yobunzima, i-thermal conductivity, kunye ne-deformation resistance, okwenza kube yinto ekhethekileyo yokukhethwa kwezinto eziphambili zoomatshini be-lithography.
2, inqanaba leNano elichanekileyo 'umlindi ongabonakaliyo'
Kwinqanaba eliphezulu koomatshini be-lithography abafana ne-ASML yaseNetherlands, i-NIKON kunye ne-CANON eJapan, iiseramics ze-silicon carbide zibhala ngokuzolileyo imithetho yokwenziwa ngokuchanekileyo:
Inqanaba lemaski: ukuthwala ifotomask enexabiso elilingana negolide, ukugcina inqanaba le-nanometer lichanekile ngexesha lokuhamba ngesantya esiphezulu.
Isubstrate yesipili esibonakalisayo: Uburhabaxa bomphezulu buncinci kakhulu, bude bugude kunomphezulu wesipili.
Igumbi lokucoca: Emva kweminyaka elishumi yokusetyenziswa, i-deformation ingaphantsi kwewaka leenwele zomntu
Oku kuzinza phantse 'kuchasene nengqiqo' kuvela kwiijini ezintathu ze-silicon carbide:
1. I-coefficient yokwandiswa kwe-thermal isondela ku-zero: phantse "iminyaka engumkhenkce" ukusuka -150 ℃ ukuya kwi-500 ℃
2. Amaxesha amathathu anzima kunentsimbi: ukumelana nomonakalo omncinci obangelwa yi-particle bombardment
3. Iimpawu zokuzithambisa: Ukufezekisa ukuhanjiswa okuchanekileyo ngaphandle kweoyile kwindawo yevacuum
3, 'Inguquko ethe cwaka' kushishino lwesemiconductor
Njengoko inkqubo yokwenziwa kwetshiphu ingena kwixesha le-2-nanometer, iiseramics zesilicon carbide ziyaphula imida eyongezelelekileyo:
I-double worktable: ivumela iinkqubo ezimbini ukuba zigqibe "inqanaba le-atomic relay" kwindawo ye-vacuum.
Inkqubo yendlela ye-EUV yokukhanya: imelana nebhombu eqhubekayo ye-13.5nm yokukhanya okugqithisileyo kwe-ultraviolet.
Inkqubo yonxibelelaniso ye-Multi axis: ukufikelela kumanyathelo angama-200 e-nanoscale ngesekhondi ngaphandle kokuvelisa iimpazamo ezongezelekayo.
Umatshini othile we-lithography Iqela le-R & D lenze iimvavanyo ezithelekisayo: emva kokusebenzisa i-silicon carbide ceramic workpiece stage, inkqubo yokumisa ukuchaneka kwenkqubo iye yaphuculwa ngama-40%, kwaye umjikelo wokugcinwa kwezixhobo uye wandiswa ukusuka kwiinyanga ezi-3 ukuya kwi-2 iminyaka. Olu tshintsho alunciphisi kuphela iindleko zokuvelisa iitshiphusi, kodwa luzisa nokuchaneka kokuveliswa kwe "chips zaseTshayina" kwindawo yokuqala kwimigangatho yamazwe ngamazwe okokuqala.
I-4, Indlela yokunyuka ukusuka kwibhubhoratri ukuya kwimizi-mveliso
Ukwenziwa komgangatho wesilicon carbide ceramics kufana nokwakha 'ibhotwe elingenasiphako' kwihlabathi lemicroscopic:
Ubunyulu bezinto ezikrwada: Umgubo ococekileyo wesilicon carbide, amawaka amaxesha acocekileyo kunetyuwa etyiwayo.
Inkqubo ye-Sintering: Ulawulo oluchanekileyo lwecala lokukhula kwekristale kumaqondo obushushu aphezulu.
Ukuchwetheza ngokuchanekileyo kusetyenziswa izixhobo zokusika idayimani kwinqanaba le-micron lokukrola kuthatha ixesha elininzi njengokubuyiselwa kwezinto zenkcubeko.
Yile mpumelelo iphindwe kabini "yezinto zesayensi + ngokuchanekileyo ukwenziwa kwemveliso" eye yenza izixhobo ezibukhali, ezazifudula zilinganiselwe kwi-aerospace kunye nemizi mveliso yasemkhosini, ngoku ibe zizinto ezisisiseko ezixhasa impucuko yedijithali.
Kwinkqubo yanamhlanje yokwenziwa kwetshiphu, efikelele kumda womzimba, iiseramics zesilicon carbide zibonakalisa ngeempawu zayo “zero compromise” ukuba ukuchaneka okuyinyani ayikokupakishwa kwedatha, kodwa lolona lawulo luphezulu kundoqo wemathiriyeli. Xa icandelo ngalinye le-ceramic lithwala isithembiso sezigidi zeentshukumo ze-nanoscale, into esiyibonayo ayikona nje ukuguquka kwezixhobo ze-semiconductor, kodwa kunye nokuzimisela koshishino lwesizwe ukuqhubela phambili kwincopho yokuchaneka.
Ixesha lokuposa: Apr-03-2025