Mechineng ea lithography bakeng sa ho etsa li-chip, phoso e sa bonahaleng e ka senya liphaephe tse jang limilione tsa lidolara. Micrometer e 'ngoe le e' ngoe ea ho falla mona e bohlokoa katlehong kapa ho hloleheng ha li-circuits tsa nanoscale, 'me motheo o tšehetsang motjeko ona o nepahetseng ke mohanyetsi oa rona kajeno:lintho tse entsoeng ka silicon carbide ceramic- e tšoana le matla a tsitsitseng lefats'eng la microscopic, ho lebela mokhoa o nepahetseng oa bophelo ba indasteri ea semiconductor ea sejoale-joale maemong a feteletseng.
1, Ha li-Ceramics li Kopana le Chips: Phephetso ea ho qetela ka ho Nepaha
Likarolo tse nepahetseng tsa ceramic tsa mochini oa lithography li hloka ho bapala likarolo tse tharo ka nako e le ngoe:
Motheo o tsitsitseng haholo: o mamella khatello ea lithane tse 'maloa nakong ea ho pepeseha empa e lula e sa sisinyehe.
Temperature Sentinel: E boloka botsitso ba mocheso tlas'a ts'oaetso e phahameng ea mocheso oa laser.
Vacuum Guardian: e boloka boemo ba athomo bo bataletseng ka lilemo tse leshome sebakeng sa zero vibrate.
Lisebelisoa tsa tšepe tse tloaelehileng li tla hlahisa "micro tremors" ka lebaka la ho atolosoa ha mocheso le ho fokotseha, ha lisebelisoa tsa polymer li le thata ho hanela kutu ea plasma. Li-ceramics tsa Silicon carbide, tse nang le sebopeho sa tsona se ikhethang sa kristale, li fihlella ho leka-lekana ka thata ka thata, ho tsamaisa mocheso, le ho hanyetsa deformation, e leng se etsang hore e be khetho e holimo bakeng sa likarolo tsa mantlha tsa mechine ea lithography.
2, boemo bo nepahetseng ba Nano 'molebeli ea sa bonahaleng'
Mechineng ea maemo a holimo e kang ASML ea Netherlands, NIKON le CANON ea Japane, lirafshoa tsa silicon carbide li ngola ka mokhoa o khutsitseng melao ea tlhahiso e nepahetseng:
Sethala sa maske: ho nka photomask ea boleng bo lekanang le ba khauta, ho boloka boemo ba nanometer bo nepahetse nakong ea ho sisinyeha ka lebelo le phahameng.
Reflective mirror substrate: Bokhopo ba bokaholimo bo nyane haholo, ebile bo boreleli ho feta bokaholimo ba seipone.
Vacuum room: Kamora lilemo tse leshome tsa tšebeliso, deformation e ka tlase ho sekete sa moriri oa motho
Ho tsitsa hoo e batlang e le 'anti common sense' ho tsoa liphatseng tse tharo tsa silicon carbide:
1. Coefficient ea katoloso ea mocheso e atamela zero: hoo e ka bang "lilemo tse leqhoa" ho tloha ho -150 ℃ ho ea ho 500 ℃
2. Ka makhetlo a mararo ho feta tšepe: e hanyetsanang le tšenyo e nyenyane e bakoang ke ho phatloha ha liphahlo
3. Litšobotsi tsa ho itlotsa: Finyella phetisetso e nepahetseng e se nang oli sebakeng sa vacuum
3、 The 'silent Revolution' indastering ea semiconductor
Ha ts'ebetso ea tlhahiso ea chip e kena mehleng ea 2-nanometer, li-ceramics tsa silicon carbide li ntse li tlola meeli e meng:
Dual worktable: e lumella litsamaiso tse peli ho phethela "relay ea boemo ba atomic" sebakeng sa vacuum.
EUV Optical path system: e hanana le ho phatloha ho sa khaotseng ha leseli la ultraviolet la 13.5nm.
Sistimi ea khokahano ea li-axis tse ngata: ho fihlela mehato e 200 ea nanoscale motsotsoana ntle le ho hlahisa liphoso tse akaretsang.
Sehlopha sa R&D sa mochini o itseng oa lithography se entse liteko tse bapisoang: kamora ho sebelisa sethala sa silicon carbide ceramic workpiece, ho nepahala ha boemo ba sistimi ho ntlafalitsoe ka 40%, mme potoloho ea tlhokomelo ea lisebelisoa e ekelitsoe ho tloha likhoeling tse 3 ho isa ho lilemo tse 2. Phetoho ena ha e fokotse feela litšenyehelo tsa tlhahiso ea li-chips, empa hape e tlisa ho nepahala ha tlhahiso ea "lichifi tsa China" ho ea pele ho litekanyetso tsa machaba ka lekhetlo la pele.
4, Tsela ea ho hloa ho tloha laboratoring ho ea indastering
Ho etsa li-lithography grade silicon carbide ceramics ho tšoana le ho aha 'ntlo ea borena e se nang sekoli' lefatšeng la microscopic:
Bohloeki ba lintho tse tala: Phofo e hloekileng ea silicon carbide, makhetlo a likete e hloekile ho feta letsoai le jeoang.
Sintering process: taolo e nepahetseng ea tataiso ea kholo ea kristale mochesong o phahameng.
Ho sebetsa ka mokhoa o nepahetseng ka ho sebelisa lisebelisoa tsa ho seha litaemane bakeng sa ho betla li-micron level ho nka nako e ngata joalo ka ho khutlisa mesaletsa ea setso.
Ke katleho ena e 'meli ea "masaense ea ho etsa lintho + ka nepo" e entseng lisebelisoa tsa morao-rao, tseo pele li neng li lekanyelitsoe ho liindasteri tsa lifofane le tsa sesole, joale e se e le likarolo tsa mantlha tse tšehetsang tsoelopele ea dijithale.
Ts'ebetsong ea kajeno ea tlhahiso ea li-chip, e fihletseng moeli oa 'mele, li-ceramics tsa silicon carbide li paka ka litšobotsi tsa eona tsa "zero compromise" hore ho nepahala ha 'nete ha se ho bokella lintlha, empa ke taolo ea mantlha holim'a boleng ba thepa. Ha karolo e 'ngoe le e' ngoe ea ceramic e na le ts'episo ea limilione tsa metsamao ea nanoscale, seo re se bonang ha se feela phetoho ea lisebelisoa tsa semiconductor, empa hape le boikemisetso ba indasteri ea naha ho ea sehlohlolong sa ho nepahala.
Nako ea poso: Apr-03-2025