Mashiinnada lithography ee wax-soo-saarka chip-ka, khaladka aan la arki karin wuxuu baabi'in karaa waferrada qiimihiisu yahay malaayiin doollar. Mikrometer kasta oo barokaca halkan ah ayaa muhiim u ah guusha ama guuldarada wareegyada nanoscale, iyo xudunta taageerta qoob-ka-ciyaarka saxda ah waa halyeygayada maanta:maaddada dhoobada silikon carbide- waxay la mid tahay xoogga xasilinta ee adduunka yar-yar, ilaalinaya hab nololeedka saxda ah ee warshadaha semiconductor-ka casriga ah ee jawiga aadka u daran.
1. Markay Ceramics-ku kulmaan Chips: Caqabadda ugu dambaysa ee saxnaanta
Qaybaha dhoobada saxda ah ee mishiinada lithography waxay u baahan yihiin inay ciyaaraan saddex door oo isku mar ah:
Saldhig aadka u xasiloon: waxa uu u adkaystaa dhawr tan oo cadaadis ah wakhtiga soo-gaadhista laakiin waxa uu ahaanayaa dhaqdhaqaaq la'aan.
Heerkulka sentinel: wuxuu ilaaliyaa xasiloonida kulaylka hoostiisa shoogga kulaylka sare ee laysarka.
Ilaaliyaha Vacuum: waxa uu ilaaliyaa heerka atomikada toban sano meel gariir eber ah.
Qalabka biraha dhaqameedku waxay soo saari doonaan "gariir yar" sababtoo ah balaadhinta kulaylka iyo foosha, halka walxaha polymer ay adagtahay in ay iska caabiyaan daxalka balaasmaha. Ceramics Silicon carbide, oo leh qaab-dhismeedkooda crystal-ka u gaarka ah, waxay ku gaadhaan isku dheelitirnaan qumman ee engegnaanta, kuleylka kuleylka, iyo iska caabbinta qallafsanaan, iyaga oo ka dhigaya doorashada ugu sarreysa qaybaha aasaasiga ah ee mashiinnada lithography.
2, Nano heerka saxda ah 'ilaaliye aan la arki karin'
Mashiinnada heerka sare ee lithography sida ASML ee Nederland, NIKON iyo CANON ee Japan, ceramics silikoon carbide ayaa si aamusnaan ah dib ugu qoraya xeerarka wax soo saarka saxda ah:
Marxaladda maaskaro: Qaadashada maaskaro sawir qaade ah oo qiimahoodu le'eg yahay dahabka, ilaalinta saxnaanta meelaynta heerka nanometer inta lagu jiro dhaqdhaqaaqa xawaaraha sare leh.
Substrate-ka muraayadda milicsiga: qallafsanaanta dusha sare aad bay u yar tahay, xitaa way ka siman tahay oogada muraayadda.
Qolka vacuum: Toban sano oo la isticmaalo ka dib, qallafsanaantu waxa ay ka yar tahay kun meelood meel timaha bini'aadamka
Tani waxay ku dhowdahay 'caqliga ka-hortagga ah' xasilloonida waxay ka timaadaa hidde-sideyaasha saddex-geesoodka ah ee walxaha carbide silicon:
1. Isku-dhafka balaadhinta kulaylku wuxuu ku wajahan yahay eber: ku dhawaad "da'da barafsan" laga bilaabo -150 ℃ ilaa 500 ℃
2. Saddex jeer ka adag birta: adkaysi u leh waxyeellada yar yar ee ay keento bambooyinka walxaha
3. Sifooyinka saliidaynta: Gaarsii gudbinta saxda ah ee bilaa saliida ah ee jawiga faaruq ah
3. 'Kacaanka aamusan' ee warshadaha semiconductor
Maaddaama habka wax-soo-saarka chip-ku uu galo xilliga 2-nanometer, ceramics-ka silikoon carbide waxay jebinayaan xad badan:
Miiska labajibbaaran ee shaqada: waxay u ogolaataa laba hab si ay u dhamaystiraan "soo gudbinta heerka atomiga" ee deegaan faaruq ah.
Nidaamka Jidka indhaha ee EUV: u adkaysta duqaynta joogtada ah ee 13.5nm iftiinka ultraviolet daran.
Nidaamka isku xirka dhidibka badan: gaaritaanka 200 nanoscale tillaabo ilbiriqsi kasta iyada oo aan la dhalin khaladaad isbiirsaday.
Mashiinka litography-ga gaar ah kooxda R&D waxay sameeyeen tijaabooyin isbarbardhig ah: ka dib markii la isticmaalo marxaladda shaqada dhoobada silikoon carbide ceramic workpiece, saxnaanta meelaynta nidaamka ayaa la hagaajiyay 40%, iyo wareegga dayactirka qalabka ayaa laga kordhiyey 3 bilood ilaa 2 sano. Isbeddelkani ma aha oo kaliya inuu yareeyo kharashka wax soo saarka ee chips, laakiin sidoo kale wuxuu keenaa saxnaanta wax soo saarka ee "chips" ee safka hore ee heerarka caalamiga ah markii ugu horeysay.
4. Waddada loo fuulo shaybaadhka ilaa warshadaynta
Samaynta darajada lithography ee dhoobada silikoon carbide ceramics waxay la mid tahay dhisidda 'qari aan cillad lahayn' oo ku yaal adduunka yar yar:
Nadiifadda alaabta ceeriin: Budada carbide siliconka saafiga ah, kumanaan jeer ayaa ka nadiifsan milixda la cuni karo.
Habka Sintering: xakamaynta saxda ah ee jihada koritaanka crystal ee heerkulka sare.
Mashiinka saxda ah iyadoo la adeegsanayo aaladaha goynta dheemanka ee xardhitaanka heerka micron-hoosaadka waxay qaadataa waqti badan sida soo celinta dhaqameed.
Waa horumarkan laba-geesoodka ah ee “sayniska agabka + wax-soo-saarka saxda ah” ee sameeyay agab-goyn, kuwaas oo markii hore ku koobnaa hawada hawada iyo warshadaha milatariga, hadda waxay noqdeen qaybaha aasaasiga ah ee taageeraya ilbaxnimada dhijitaalka ah.
Habka wax-soo-saarka chip-ka ee maanta, kaas oo gaadhay xadka jireed, dhoobada silikoon carbide ceramics waxay caddaynaysaa sifooyinkeeda "eber tanaasulka" in saxnaanta dhabta ah aysan ahayn isku-darka xogta, laakiin xakamaynta ugu dambeysa ee nuxurka alaabta. Marka qayb kasta oo dhoobada ah ay qaado ballanqaadka malaayiin dhaqdhaqaaqyo nanoscale ah, waxa aan aragno ma aha oo kaliya horumarinta qalabka semiconductor, laakiin sidoo kale go'aaminta warshadaha qaranka si ay ugu gudbaan heerka ugu sarreeya ee saxda ah.
Waqtiga boostada: Abriil-03-2025