Munyika chaiyo yeindastiri yemazuva ano, madiki deformations ezvigadzirwa anowanzo sarudza yekupedzisira kuita kwemidziyo.Silicon carbide ceramics, nemaitiro avo akasiyana emuviri, vari kuita "muchengeti akasimba" akakosha mumunda wekugadzira wepamusoro. Iyo yepamusoro ceramic zvinhu yakasarudzika kuramba deformation kutsanangudza maitiro ekuita kweiyo chaiyo michina.
1, Rigid sainzi kodhi
Iyo elastic modulus yechinhu yakafanana nemutongi wekuyera kuomarara, ichitarisa zvakananga kugona kwayo kuramba deformation pasi pekushushikana. Iyo elastic modulus yesilicon carbide ceramics inodarika katatu yesimbi yakajairwa, iyo inoita kuti ifanane nesimbi yekusimbisa skeleton muzvivakwa kana ichimanikidzwa - kunyangwe pasi pekuremerwa kwakasimba kwemidziyo inorema, deformation ingori 1/4 yeiyo yesimbi zvinhu.
Uku kuomarara kunoshamisa kunobva kune yakasimba covalent bond chimiro mukati mechinhu. Imwe neimwe kabhoni atomu yakanyatsobatanidzwa kune mana maatomu esilicon kuburikidza nekudyidzana kwakasimba, ichigadzira matatu-dimensional network crystal chimiro. Kana masimba ekunze aita, iyi yakagadzika lattice chimiro inogona kunyatso kuparadzira kushushikana uye kudzora deformation mukati meiyo micrometer renji. Muminda yakadai seyakanyatsoona mapuratifomu uye semiconductor yekugadzira michina ine zero kushivirira kwe deformation, hunhu uhu hunova kiyi yekuve nechokwadi.
2, Huzivi hwezvinhu zvinosanganisa kusimba uye kuchinjika
Silicon carbide ceramics haingoratidzi kusimba kwepamusoro-soro, asi zvakare ine inoshamisa mashandiro akazara:
1. Yakaomarara asi isina kuputsika: Simba rayo rekukotama rinopfuura resimbi yakakosha, uye kunyange pasi pekumanikidzwa kwakaenzana nerenzou yakura yakamira netsoka imwe (inenge 400MPa), inogona kuramba iine chimiro chekuvimbika. Uku kusanganiswa kwesimba repamusoro uye kusimba kwepamusoro kunogadzirisa dambudziko reindasitiri yemakirabhu echinyakare kuve asina kusimba.
2. Thermal kugadzikana segomo: Thermal yekuwedzera coefficient yechinhu ingori 1/4 yesimbi, uye saizi inoshanduka ishoma mukusiyana kwekushisa kwe200 ℃. Yakasanganiswa neayo yakanakisa yekupisa conductivity, inogona kukurumidza kuenzanisa tembiricha gradient uye kudzivirira deformation kuunganidza kunokonzerwa nekupisa kwekushushikana.
3. Non deformation: Pasi pekuenderera mberi kwekushushikana, iyo inokambaira mwero yesilicon carbide mirairo miviri yehukuru yakaderera pane iyo yesimbi zvinhu. Izvi zvinoreva kuti kunyangwe ikaiswa pamutoro mumwechete kwemakore gumi, shanduko yechimiro chayo inogona kuramba ichidzorwa pasi peiyo chiyero chekuona chiridzwa.
3, Yakaomarara tekinoroji kukosha
Uku kugona kunoshamisa kuramba deformation kuri kugadzira mikana mitsva yemaindasitiri:
Mune setiraiti optical masisitimu, ita shuwa kuti girazi rinochengetedza nanometer level flatness pasi pekupisa kwakanyanya kusiyana munzvimbo.
Chengetedza sub micron yekumisikidza kurongeka kweiyo inofamba chikuva chemiconductor wafer yekugadziridza michina panguva yekumhanya-mhanya.
Chengetedza kugadzikana kwejometri yechimiro chakavharwa chekamuri yekumanikidza yemidziyo yekuongorora yakadzika-gungwa kunyangwe pasi pemakiromita nhanho yemvura.
Isu tinoshandura mukana wezvinhu izvi kuita makwikwi etekinoroji kuburikidza nemaitiro matsva: kutora nzira dzekugadzira dzepamusoro kuti dziwedzere kuwanda kwezvinhu; Nekushandisa tekinoroji yepamusoro-soro, kuomarara kunokwidziridzwa uku uchichengetedza kuomarara kwepamusoro-soro. Batch yega yega yezvinhu inoedzwa zvakasimba kuti ive nechokwadi chekuti zvigadzirwa zvinounzwa zvinosangana kana kutopfuura zvinodiwa nevatengi.
Nhasi, sekugadzira kwacho kuchienda kune nanoscale, silicon carbide ceramics iri kududzira iko kutsvakwa kweindasitiri yemazuva ano ne "huzivi hwakaoma" - vachishandisa kugadzikana kwakakwana kwezvinhu kutsigira kusingaperi mukana wekugadzira. Uku budiriro yetekinoroji, iyo inosanganisira huchenjeri hwesainzi yemidziyo, icharamba ichipinza hunyanzvi hwe "kushandisa kusimba kukunda kuchinjika" mukugadzira michina yemhando yepamusoro.
Nguva yekutumira: Kubvumbi-29-2025