Mumichina yelithography yekugadzira chip, chikanganiso chisingaoneki chinogona kuparadza mawafer anokosha mamirioni emadhora. Yese micrometer yekutamiswa pano yakakosha pakubudirira kana kutadza kwema nanoscale maseketi, uye musimboti unotsigira iyi chaiyo yekutamba ndiyo protagonist yedu nhasi:silicon carbide ceramic zvinhu- yakaita sesimba rinodzikamisa munyika ine microscopic, inochengetedza nzira chaiyo yemazuva ano semiconductor indasitiri munzvimbo dzakanyanyisa.
1, Kana Ceramics Inosangana Chips: A Ultimate Dambudziko Mukurongeka
Iyo chaiyo ceramic zvikamu zvelithography michina inoda kutamba mabasa matatu panguva imwe chete:
Ultra yakagadzika base: inomira akati wandei matani ekumanikidza panguva yekuratidzwa asi inoramba isingafambi.
Temperature sentinel: inochengetedza kugadzikana kwekupisa pasi peyakanyanya kupisa kuvhunduka kwelaser.
Vacuum Guardian: inochengetedza atomic level flatness kwemakore gumi munzvimbo ye zero vibration.
Zvigadzirwa zvesimbi zvechinyakare zvinogadzira "micro tremors" nekuda kwekuwedzera kwekupisa uye kuputika, nepo polymer zvinhu zvakaoma kuramba plasma corrosion. Silicon carbide ceramics, ine yakasarudzika kristaro chimiro, inowana chiyero chakakwana mukuoma, kupisa conductivity, uye deformation kuramba, zvichiita kuti ive sarudzo yepamusoro yezvakakosha zvikamu zvelithography michina.
2, Nano level chaiyo 'asingaoneki murindi'
Mumichina yepamusoro tier lithography senge ASML muNetherlands, NIKON uye CANON kuJapan, silicon carbide ceramics vari kunyora chinyararire mitemo yekugadzira chaiyo:
Mask nhanho: kutakura photomask yakakosha segoridhe, kuchengetedza nanometer level yekumisikidza kurongeka panguva yekumhanya-mhanya.
Reflective mirror substrate: Hushasha hwepamusoro hwakanyanya kudiki, kunyange kutsvedzerera kupfuura girazi repamusoro.
Vacuum chamber: Mushure memakore gumi ekushandiswa, deformation iri pasi pechiuru chebvudzi remunhu
Iyi ingangoita 'anti common sense' kugadzikana kunobva kune matatu majini esilicon carbide zvinhu:
1. Iyo coefficient yekuwedzera kwekupisa inoswedera ku zero: ingangoita "zera rechando" kubva -150 ℃ kusvika 500 ℃.
2. Katatu kuomarara kupfuura simbi: inoshingirira kukuvadzwa kwemicroscopic kunokonzerwa nechikamu chebhomba
3. Self lubrication maitiro: Wana mafuta-isina chaiwo kutapurirana munzvimbo yevacuum
3、 Iyo 'yakanyarara chimurenga' mune semiconductor indasitiri
Sezvo nzira yekugadzira chip ichipinda mu2-nanometer era, silicon carbide ceramics iri kupaza nepakati pemiganho:
Dual worktable: inobvumira masisitimu maviri kupedzisa "atomic level relay" munzvimbo yevacuum.
EUV optical path system: inoshingirira kuenderera kubhomba kwe13.5nm yakanyanyisa ultraviolet mwenje.
Multi axis linkage system: kuwana 200 nanoscale nhanho pasekondi pasina kuunza kukanganisa kukanganisa.
Imwe lithography muchina R&D timu yakaita bvunzo dzekuenzanisa: mushure mekushandisa silicon carbide ceramic workpiece nhanho, iyo sisitimu yekumisikidza kurongeka yakagadziridzwa ne40%, uye kutenderera kwemidziyo kwakawedzerwa kubva kumwedzi mitatu kusvika kumakore maviri. Shanduko iyi haingodzikisi mutengo wekugadzira machipisi, asi zvakare inounza chokwadi chekugadzira che "Chinese machipisi" pamberi pezviyero zvepasirese kekutanga.
4, Nzira yekukwira kubva murabhoritari kuenda kumaindasitiri
Kugadzira lithography giredhi silicon carbide ceramics kwakafanana nekuvaka 'muzinda usina mhosva' munyika ine microscopic:
Raw material kuchena: Ultra yakachena silicon carbide poda, zviuru zvenguva kuchena kupfuura munyu unodyiwa.
Sintering process: kunyatso kudzora kwekristaro kukura kwekutungamira pakupisa kwakanyanya.
Precision machining uchishandisa maturusi ekucheka madhaimani e sub micron level kuveza zvinotora nguva yakawanda sekudzoreredzwa kwetsika.
Uku ndiko kubudirira kuviri kwe "zvinhu zvesainzi + kunyatso gadzira" izvo zvakagadzira zvekucheka-kumucheto, izvo zvaimbove zvakaganhurirwa kune aerospace nemaindasitiri emauto, zvino zvave izvo zvakakosha zvinotsigira budiriro yedhijitari.
Mumazuva ano ekugadzira chip maitiro, ayo asvika pamuganho wemuviri, silicon carbide ceramics inoratidza neayo "zero compromise" hunhu kuti chokwadi chaicho hachisi kurongedza data, asi yekupedzisira kutonga pamusoro pechinhu chemidziyo. Kana chikamu chega chega checeramic chinotakura chivimbiso chemamiriyoni ekufamba kwenanoscale, izvo zvatinoona hazvisi chete kushanduka kwemidziyo yesemiconductor, asiwo kutsunga kweindasitiri yenyika kuti ienderere pamusoro peiyo chaiyo.
Nguva yekutumira: Kubvumbi-03-2025