Mu mashini ya lithographie yo gukora chip, ikosa ritagaragara rishobora gusenya wafer ifite agaciro ka miliyoni. Buri micrometero yo kwimurwa hano ningirakamaro mugutsinda cyangwa kunanirwa kwinzira ya nanoscale, kandi intandaro ishyigikira iyi mbyino itomoye niyo ntwari yacu uyumunsi:silicon carbide ceramic ibikoresho- ni nkimbaraga zihamye mwisi ya microscopique, irinda ubuzima bwuzuye bwinganda zigezweho za semiconductor mubidukikije bikabije.
1 、 Iyo Ceramics ihuye na Chips: Ikibazo Cyanyuma Muburyo Bwuzuye
Ibice bya ceramic byuzuye byimashini za lithographie bigomba gukina inshuro eshatu icyarimwe:
Ultra stabilite base: ihanganira toni nyinshi zumuvuduko mugihe cyo kugaragara ariko ikomeza kugenda.
Ubushyuhe bwa sentinel: bugumana ituze ryumuriro munsi yumuriro mwinshi wa laser.
Vacuum Murinzi: ikomeza urwego rwa atome kumyaka icumi mubidukikije bya zeru.
Ibikoresho gakondo bizatanga "micro titre" kubera kwaguka kwinshi no kugabanuka, mugihe ibikoresho bya polymer bigoye kurwanya ruswa. Silicon carbide ceramics, hamwe nuburyo bwihariye bwa kirisiti, igera kuburinganire bwuzuye mubukomere, ubushyuhe bwumuriro, hamwe no kurwanya deformasiyo, bigatuma bahitamo icyambere mubice byingenzi bigize imashini zandika.
2 level Urwego rwa Nano neza neza 'rutagaragara kurinda'
Imashini zo hejuru zo mu bwoko bwa lithographie nka ASML mu Buholandi, NIKON na CANON mu Buyapani, ceramics ya silicon karbide yandika bucece amategeko yo gukora neza:
Icyiciro cya mask: gutwara fotomask ifite agaciro kangana na zahabu, kugumana urwego rwa nanometero neza neza mugihe cyihuta.
Indorerwamo yerekana indorerwamo: Ubuso bwubuso ni buto cyane, ndetse bworoshye kuruta indorerwamo.
Icyumba cya Vacuum: Nyuma yimyaka icumi yo gukoresha, deformasiyo iri munsi yigihumbi cyumusatsi wumuntu
Uku guhagarara hafi ya 'anti common sense' guturuka kuri genes eshatu zibikoresho bya karubide ya silicon:
1. Coefficient yo kwagura ubushyuhe yegera zeru: hafi "imyaka ikonje" kuva -150 ℃ kugeza 500 ℃
2. Inshuro eshatu zikomeye kuruta ibyuma: birwanya kwangirika kwa microscopique biterwa no guterwa ibisasu
3. Ibiranga amavuta yo kwisiga: Kugera kubintu bitarimo amavuta neza mubidukikije
3 '' Impinduramatwara icecekeye 'mu nganda zikoresha igice
Mugihe ibikorwa byo gukora chip byinjira mugihe cya 2-nanometero, ceramika ya silicon karbide irenze imipaka:
Imikorere ibiri: yemerera sisitemu ebyiri kurangiza "urwego rwa atome relay" mubidukikije.
Sisitemu ya optique yinzira ya EUV: irwanya ibisasu bikomeza bya 13.5nm urumuri rukabije rwa ultraviolet.
Sisitemu yo guhuza sisitemu nyinshi: kugera kuri 200 nanoscale intambwe kumasegonda nta kubyara amakosa.
Imashini imwe ya lithographie itsinda R&D yakoze ibizamini bigereranya: nyuma yo gukoresha silicon carbide ceramic ceramic workpiece icyiciro, sisitemu ihagaze neza neza ya 40%, kandi uburyo bwo gufata neza ibikoresho bwongerewe kuva kumezi 3 kugeza kumyaka 2. Iri hinduka ntirigabanya gusa ikiguzi cyumusaruro wa chipi, ariko kandi rizana ubunyangamugayo bwibikorwa bya "Chipine Chine" kumwanya wambere mubipimo mpuzamahanga kunshuro yambere.
4 Inzira yo kuzamuka kuva muri laboratoire kugera mu nganda
Gukora lithographie yo mu rwego rwa silicon karbide ceramics ni nko kubaka 'ingoro itagira inenge' mwisi ya microscopique:
Ibikoresho byera: Ultra yuzuye silicon karbide ifu, inshuro ibihumbi byera kuruta umunyu uribwa.
Uburyo bwo gucumura: kugenzura neza icyerekezo cyo gukura kwa kirisiti ku bushyuhe bwinshi.
Gutunganya neza ukoresheje ibikoresho byo gukata diyama kubutaka bwa micron urwego rwo gushushanya bifata igihe kinini nko gusana ibisigisigi byumuco.
Nibwo buryo bubiri bw '“ibikoresho bya siyansi + inganda zuzuye” byatumye ibikoresho bigezweho, byahoze bigarukira mu kirere no mu nganda za gisirikare, ubu bihinduka ibice by'ibanze bishyigikira umuco wa sisitemu.
Muri iki gihe gahunda yo gukora chip, igeze ku mubiri, ceramique ya silicon carbide ceramique irerekana hamwe na "zero compression" iranga ko ukuri kwukuri atari ugukusanya amakuru, ahubwo ni kugenzura byimazeyo ishingiro ryibikoresho. Iyo buri kintu ceramique gitwaye amasezerano ya miriyoni yimodoka ya nanoscale, icyo tubona ntabwo ari ihindagurika ryibikoresho bya semiconductor gusa, ahubwo ni icyemezo cyinganda zigihugu kugirango zigere kumasonga yukuri.
Igihe cyo kohereza: Apr-03-2025