SIC Gawo la CVD limapanga zokutira

Mankhwala osokoneza bongo

Mankhwala a Vapor Exrofy (CVD) oxide ndi mzere wokulirapo pomwe mpweya wokhazikika umayika filimu yopyapyala ku riyakitala. Kukula kwake ndi kutentha kochepa ndipo kumakhala ndi kuchuluka kwambiri poyerekeza ndiThermal oxide. Zimatulutsanso zigawo zambiri zowonda diicon dioxide chifukwa filimuyo imayikidwa, m'malo mokulanda. Njirayi imapanga kanema wokhala ndi magetsi apamwamba, omwe ndi abwino kugwiritsa ntchito ma ric ndi ma mems, m'magulu ena ambiri.

Mankhwala a Vapor Exor (CVD) Oxide amachitidwa pomwe gawo lakunja likufunika koma gawo lapansi la silicon silingathe kukhala oxidized.

Mankhwala mkamwa:

Kukula kwa cvd kumachitika pamene mpweya kapena mpweya (wowongolera) umayambitsidwa kutentha pang'ono pomwe ofunda amakonzedwa molunjika kapena molunjika. Mafuta amasunthira kudzera mu kachitidwe ndikugawananso magawo omwewo padziko lonse lapansi. Popeza izi zikuyenda kudzera mu riyakitalayo, zodwala zimayamba kuyamwa pansi.

Nthawi yomweyo otsogola agawidwa chimodzimodzi m'dongosolo lonse, mankhwalawa amayamba mogwirizana ndi gawo la magawo. Izi zimachitika chifukwa cha zisumbu, ndipo monga momwe ntchitoyo ikupitilira, zisumbu zimakula ndikuphatikiza kuti pakhale filimu yomwe mukufuna. Zochita zamankhwala zimapanga ma biproduct pamalo a ofera, omwe amasokoneza malire ndikutuluka mu riyakitalayo, kusiya zofunda zokhazokha ndi zokutira zawo zosungidwa.

Chithunzi 1

Ubwino wa Vapor Vapor Yofunika:

• Kukula kwa kutentha kochepa.
• Kuchuluka kwa zowoneka bwino (makamaka APCVD).
• Siyenera kukhala gawo lapansi la silicon.
• Kupeza bwino (makamaka pecvd).

Chithunzi 2
Silicon Dioxide Portowy Vs. Kukula

Kuti mumve zambiri za mankhwala osokoneza bongo kapena kupempha mawu, chondeLumikizanani ndi SVMLero kuti mulankhule ndi membala wa gulu lathu logulitsa.

Mitundu ya CVD

LPCVD

Kupanikizika kochepa kwa mankhwala osokoneza bongo ndi njira yamagetsi yogwiritsa ntchito mankhwala osakanizidwa popanda kukanikiza. Kusiyana kwakukulu pakati pa LPCVD ndi njira zina za CVD ndizotentha. LPCVD imagwiritsa ntchito kutentha kwambiri ku mafilimu, makamaka kuposa 600 ° C.

Malo otsika otsika amapanga kanema wofanana kwambiri ndi chiyero chokwanira, kubereka, komanso homogeneity. Izi zimachitika pakati pa 10 - 1,000 pa opanikizika ndi anthu 101,325 pa f. Kutentha kumapangitsa makulidwe ndi chiyero chapamwamba chomwe chimakhala ndi mafilimu abwino kwambiri.

• Mafilimu wamba omwe amasungidwa:Polysilicon, ojambulidwa & osagaweka,nnrides.

Pecvd

Plasma yowonjezera mankhwala nthunzi ndi kutentha kochepa, njira yokhazikika yodziwika bwino. Pecvd imachitika mu CVD riyactor ndi kuwonjezera kwa plasma, yomwe ndi mpweya wosanjikiza wokhala ndi zinthu zapamwamba za electron (~ 50%). Uwu ndi njira yochepetsetsa yotsika yomwe imachitika pakati pa 100 ° C - 400 ° C. Pecvd imatha kuchitidwa pamatenthedwe otsika chifukwa mphamvu zochokera kumalembiro aulere zimalepheretsa phazi logwira ntchito kuti apange filimuyo pamwamba.

Njira yoonekerayi imagwiritsa ntchito mitundu iwiri ya plasma:

1. Ozizira (osayamwa): Elemalrons imakhala ndi kutentha kwambiri kuposa tinthu tating'onoting'ono ndi ma ion. Njirayi imagwiritsa ntchito mphamvu ya ma elekitoni posintha kukakamizidwa m'chipinda chowoneka bwino.
2. Thermal: ma elekitoni ndi kutentha komweko monga tinthu tating'onoting'ono tomwe timapangira.

Mkati mwa chipinda chodetsa, ma vyawa yaziilesi-pafupipafupi amatumizidwa pakati pa electrodis pamwambapa ndi pansi pa chofewa. Izi zimakulipirani ma elekinoloni ndikuwasunga mu boma losangalatsa kuti asungitse filimu yomwe mukufuna.

Pali magawo anayi okulitsa mafilimu kudzera pa Pecvd:

1. Ikani chandamale chokwera pa ma elekitirode mkati mwa chipinda cha mawonekedwe.
2. Kuyambitsa mipweya yogwira ndi zinthu zowoneka m'chipindacho.
3. Tumizani ma presma pakati pa electrodes ndikuyika magetsi kuti asangalatse ma prusma.
4. Mafuta okhudzana ndi kuyankha ndi kuyamwa pansi popanga filimu yopyapyala, yochokera ku chipinda cha chipinda.

• Mafilimu wamba omwe amasungidwa: Silicnon oxides, silicon nitride, silicous,Silicon Oxynitrides (SI_xO_yN_z).

APCVD

Kupanikizika kwam'mwamba kwa mankhwalawa ndi njira yochepetsetsa kutentha komwe kumachitika mu ng'anjo ku Chuma. Monga njira zina za CVD, APCVD imafuna mpweya mkati mwa chipinda cha poyity, ndiye kuti kutentha kumakwera pang'onopang'ono kuzolowera kuzomera ndikuyika filimu yopyapyala. Chifukwa cha kuphweka kwa njirayi, kumakhala ndi kuchuluka kwambiri.

• Mafilimu wamba omwe adayikidwa: diyirani ndi osakanizidwa a Oxides, silicon nitrides. Amagwiritsidwanso ntchitoosonyeza.

Hdp cvd

Kuchulukitsa kwambiri kwa plasma mankhwala Vapor ndi mtundu wa Pecvd yomwe imagwiritsa ntchito ma plasma okwera, omwe amalola kuti wofesedwayo azichita ndi kutentha kochepa kwambiri (pakati pa 80 ° C) mkati mwa chipinda cha kununkhira. Izi zimapangitsanso kanema ndi ngalande yayikulu yotayira.

• Mafilimu wamba omwe amasungidwa: silicon dioxide (sio₂) Silicon nitride (si₃N₄)Silicon Carbide (sic).

Sacvd

Kupanikizika kwamphamvu kwa ma viapor Vapor kumasiyana ndi njira zina chifukwa zimachitika pansi pa ziweto zokhazikika ndikugwiritsa ntchito Ozone (o₃) Kuthandiza kuthana ndi zomwe mungachite. Njira zowonekera zimachitika pamtunda wapamwamba kuposa lpcvd koma wotsika kuposa ma apvvd, pakati pa 13,300 pa 13,300 Pa ndi 80,000 Pa ndi 80,000 Pa ndi 80,000 Pa ndi 80,000 Pa ndi 80,000 Pa ndi 80,000 Pa ndi 80,000 Pa ndi 80,000 Pasbority

• Mafilimu wamba omwe amasungidwa:Bangan, PAg,Chino.

Shandoong Zhongpeng Earmis Cemeramic Co. Sic Clumic Cluctic: Kuumitsa kwa Moh ndi 9 (kuuma kwa Moh ndi 13), kukana mwakukoloweka kwa kukokoloka ndi chiwonongeko chabwino, kukana ndi odana ndi masiyi - ogwiritsa ntchito-ocation. Moyo wautumiki wa SIC ndi 4 mpaka 5 nthawi yayitali kuposa 92% alumu. Mawa a rsic ndi 5 mpaka 7 omwe a Snbsc, itha kugwiritsidwa ntchito pazithunzi zovuta. Njira yotengera mawuyi ndi mwachangu, yoperekera ndikulonjezedwa ndipo mtunduwu ndi wachiwiri kwa wina. Nthawi zonse timalimbikira kutsutsa zolinga zathu ndikubwezeretsa zakukhosi kwathu pagulu.