M'makina opangira ma chip, cholakwika chosawoneka chitha kuwononga zowotcha zamtengo wapatali zamadola mamiliyoni. Kusamuka kulikonse komwe kumakhala pano ndikofunikira kuti mabwalo a nanoscale apambane kapena kulephera, ndipo maziko omwe amathandizira kuvina kolondola kumeneku ndi protagonist wathu lero:silicon carbide ceramic zinthu- ili ngati mphamvu yokhazikika m'dziko losawoneka bwino, loteteza njira yolondola yamakampani amakono a semiconductor m'malo ovuta kwambiri.
1, Ma Ceramics Akakumana ndi Chips: Chovuta Kwambiri Pakulondola
Zida za ceramic zolondola zamakina a lithography ziyenera kuchita magawo atatu nthawi imodzi:
Chokhazikika chokhazikika: chimapirira kukakamizidwa kwa matani angapo panthawi yowonekera koma chimakhala chosasunthika.
Kutentha kwa sentinel: kumapangitsa kukhazikika kwamafuta pansi pa kugwedezeka kwakukulu kwa laser.
Vacuum Guardian: imasunga kutsika kwa atomiki kwa zaka khumi m'malo osagwedezeka.
Zida zachitsulo zachikhalidwe zidzatulutsa "kugwedeza kwakung'ono" chifukwa cha kuwonjezereka kwa kutentha ndi kutsika, pamene zipangizo za polima zimakhala zovuta kukana dzimbiri za plasma. Silicon carbide ceramics, yokhala ndi mawonekedwe ake apadera a kristalo, amakwaniritsa bwino kuuma, kukhathamiritsa kwamafuta, komanso kukana mapindikidwe, kuwapanga kukhala chisankho chapamwamba pazigawo zazikuluzikulu zamakina a lithography.
2, Nano mlingo mwatsatanetsatane 'woyang'anira wosaoneka'
M'makina apamwamba kwambiri amtundu wazithunzi monga ASML ku Netherlands, NIKON ndi CANON ku Japan, zoumba za silicon carbide zikulembanso mwakachetechete malamulo opangira molondola:
Gawo lachigoba: kunyamula chithunzithunzi chamtengo wapatali ngati golide, kusunga malo olondola a nanometer panthawi yothamanga kwambiri.
Gawo laling'ono lagalasi lowoneka bwino: Kuuma kwapamtunda ndi kakang'ono kwambiri, ngakhale kosalala kuposa pamwamba pa galasi.
Chipinda chounikira: Pambuyo pa zaka khumi chikugwiritsidwa ntchito, mapindikidwe ake amakhala osakwana chikwi chimodzi cha tsitsi la munthu
Kukhazikika kumeneku pafupifupi kwa 'anti common sense' kumachokera kumitundu itatu ya zida za silicon carbide:
1. Coefficient ya kukula kwa matenthedwe imayandikira ziro: pafupifupi "zaka zachisanu" kuchokera -150 ℃ mpaka 500 ℃
2. Kuwirikiza katatu kuposa chitsulo: kugonjetsedwa ndi kuwonongeka kwa microscopic chifukwa cha bombardment ya tinthu
3. Makhalidwe odzipaka okha: Pezani kufala kwachangu kopanda mafuta m'malo opanda vacuum
3, The 'chete kusintha' mu makampani semiconductor
Pamene ntchito yopanga tchipisi ikulowa mu nthawi ya 2-nanometer, zoumba za silicon carbide zikudutsa malire ena:
Pawiri worktable: amalola machitidwe awiri kumaliza "atomiki mlingo relay" mu vacuum chilengedwe.
Njira ya EUV Optical path: yosagwirizana ndi bombardment yosalekeza ya 13.5nm kuwala kowopsa kwa ultraviolet.
Multi axis linkage system: kukwaniritsa masitepe 200 a nanoscale pamphindikati popanda kupanga zolakwika zochulukirapo.
Gulu lina la makina a R&D lapanga mayeso ofananira: mutatha kugwiritsa ntchito siteji ya silicon carbide ceramic workpiece, kulondola kwadongosolo kwasinthidwa ndi 40%, ndipo kuwongolera kwa zida kwakulitsidwa kuyambira miyezi itatu mpaka zaka ziwiri. Kusintha kumeneku sikungochepetsa mtengo wopangira tchipisi, komanso kumabweretsa kulondola kwa kupanga "tchipisi ta China" patsogolo pamiyezo yapadziko lonse lapansi kwa nthawi yoyamba.
4, Njira yokwera kuchokera ku labotale kupita kumakampani
Kupanga zoumba za silicon carbide ceramics zili ngati kumanga 'nyumba yachifumu yopanda chilema' m'dziko losawoneka bwino:
Kuyeretsedwa kwazinthu zopangira: Ufa wopanda silicon carbide, nthawi masauzande oyera kuposa mchere wodyedwa.
Sintering process: kuwongolera molondola kwa kukula kwa kristalo pa kutentha kwakukulu.
Kupanga mwatsatanetsatane pogwiritsa ntchito zida zodulira diamondi pakujambula kwapang'ono kakang'ono ka micron kumatenga nthawi yochuluka monga kubwezeretsanso chikhalidwe.
Ndikupambana kwapawiri kumeneku kwa "zinthu zasayansi + kupanga molondola" komwe kwapanga zida zapamwamba kwambiri, zomwe kale zinkangokhala zamamlengalenga ndi mafakitale ankhondo, tsopano zakhala zigawo zofunika kwambiri zothandizira chitukuko cha digito.
Masiku ano kupanga tchipisi, komwe kwafika pomaliza, zoumba za silicon carbide zimatsimikizira ndi "zero compromise" kuti kulondola kwenikweni sikuyika deta, koma kuwongolera kwenikweni kwazinthu. Chigawo chilichonse cha ceramic chikakhala ndi lonjezo lamayendedwe mamiliyoni ambiri a nanoscale, zomwe tikuwona sizongosintha zida za semiconductor, komanso kutsimikiza kwamakampani adziko kuti apite pachimake cholondola.
Nthawi yotumiza: Apr-03-2025