Na igwe lithography maka imepụta mgbawa, njehie a na-adịghị ahụ anya nwere ike ibibi wafers ruru nde dollar. Ihe ọ bụla micrometer nke mbugharị ebe a dị oke mkpa maka ịga nke ọma ma ọ bụ ọdịda nke sekit nanoscale, na isi na-akwado egwu egwu a bụ onye na-akwado anyị taa:silicon carbide seramiiki ihe- ọ dị ka ike na-eguzosi ike na ụwa microscopic, na-echekwa usoro ndụ ziri ezi nke ụlọ ọrụ semiconductor nke oge a na gburugburu ebe dị egwu.
1. Mgbe ceramics zutere ibe: Ihe ịma aka kacha na nke ziri ezi
Ihe mejupụtara seramiiki ziri ezi nke igwe lithography kwesịrị ịrụ ọrụ atọ n'otu oge:
Ultra stable base: na-eguzogide ọtụtụ tọn nrụgide n'oge ekpughere mana ọ na-anọgide na-enweghị isi.
sentinel okpomọkụ: na-edobe nkwụsi ike nke okpomọkụ n'okpuru nnukwu ujo nke laser.
Vacuum Guardian: na-edobe ịdị larịị atọmịk ruo afọ iri na gburugburu ịma jijiji efu.
Ngwa ọla ndị omenala ga-emepụta "micro tremors" n'ihi mgbasawanye ọkụ na nkwekọrịta, ebe ihe polymer siri ike iguzogide mmebi plasma. Silicon carbide ceramics, yana usoro kristal pụrụ iche ha, na-enweta nguzozi zuru oke na ike ike, nrụpụta ọkụ, na nguzogide nrụrụ, na-eme ka ha bụrụ nhọrọ kacha elu maka isi akụrụngwa nke igwe lithography.
2, Nano larịị nkenke 'adịghị ahụ anya onye nche'
N'ime igwe lithography dị elu dị ka ASML na Netherlands, NIKON na CANON dị na Japan, ceramik silicon carbide na-eji nwayọọ na-edegharị iwu nke nrụpụta nke ọma:
Ogbo nkpuchi: iburu fotomask bara uru ka ọla edo, na-edobe izi ezi n'ọkwa nanometer n'oge mmegharị ọsọ ọsọ.
Mkpụrụ enyo na-atụgharị uche: Ọdịiche dị n'elu dị ntakịrị, ọ dịkwa nro karịa elu enyo.
Ụlọ Vacuum: Mgbe afọ iri ejirila, nrụrụ ahụ erughị otu puku kwuru puku ntutu mmadụ
Nke a fọrọ nke nta ka ọ bụrụ 'mgbochi nkịtị' nkwụsi ike sitere na mkpụrụ ndụ ihe nketa atọ nke silicon carbide:
1. Ọnụọgụ nke thermal mgbasawanye na-abịaru nso efu: fọrọ nke nta ka "oyi oyi afọ" si -150 ℃ ka 500 ℃
2. Ugboro atọ siri ike karịa ígwè: na-eguzogide ọgwụ microscopic mebiri site n'ụdị bombu
3. Njirimara mmanye onwe onye: Nweta nnyefe ziri ezi na-enweghị mmanụ na gburugburu oghere
3, The 'silent revolution' na semiconductor ụlọ ọrụ
Ka usoro nrụpụta mgbawa na-abanye na oge 2-nanometer, ceramik silicon carbide na-emebi oke:
Igwe eji arụ ọrụ abuo: na-enye ohere ka sistemu abụọ mezue “atomiki larịị relay” na gburugburu oghere.
Sistemụ ụzọ anya EUV: na-eguzogide bọmbụ na-aga n'ihu nke ọkụ ultraviolet 13.5nm.
Sistemụ njikọ njikọ axis: imezu usoro 200 nanoscale kwa nkeji na-ewepụtaghị mperi mkpokọta.
Otu igwe R&D ụfọdụ igwe lithography emeela nnwale ntụle: mgbe ejirichara silicon carbide ceramic workpiece ogbo, 40% kwalitere izi ezi nke sistemụ, yana agbatịla usoro mmezi akụrụngwa site na ọnwa 3 ruo afọ 2. Mgbanwe a ọ bụghị naanị na-ebelata ọnụ ahịa mmepụta nke ibe, kamakwa na-eweta izi ezi nke nrụpụta "Chinese Chips" n'ihu ụkpụrụ mba ụwa maka oge mbụ.
4. The ịrị elu ụzọ si laabu ka ulo oru
Ịmepụta ọkwa lithography silicon carbide ceramics dị ka iwu ụlọ 'obí na-enweghị ntụpọ' n'ime ụwa ihe omimi:
Ihe dị ọcha: Ultra dị ọcha silicon carbide ntụ ntụ, ọtụtụ puku ugboro dị ọcha karịa nnu oriri.
Usoro mmechi: njikwa ziri ezi nke ntụzịaka uto kristal na oke okpomọkụ.
Nrụpụta nkenke site na iji ngwaọrụ ịkpụ diamond maka ịsa ọkwa obere micron na-ewe oge dị ka mweghachi omenala.
Ọ bụ ọganihu abụọ a nke "sayensị sayensị + ihe nrụpụta ziri ezi" mere ihe ndị dị oke ọnụ, bụ ndị a na-ejedebe na mbara igwe na ụlọ ọrụ ndị agha, ugbu a ghọrọ ihe ndị bụ isi na-akwado mmepeanya dijitalụ.
N'ime usoro nrụpụta mgbawa nke oge a, nke ruru oke anụ ahụ, seramiiki silicon carbide na-egosi na njirimara “nkwụsịtụ efu” ya na ezi nkenke abụghị nchịkọta data, kama ọ bụ njikwa kachasị na isi ihe. Mgbe akụkụ seramiiki ọ bụla na-ebu nkwa nke ọtụtụ nde mmegharị nanoscale, ihe anyị na-ahụ abụghị naanị mmalite nke akụrụngwa semiconductor, kamakwa mkpebi siri ike nke ụlọ ọrụ mba na-aga n'ihu na oke nke izizi.
Oge nzipu: Eprel-03-2025