Silicon carbide tau pom nyob rau xyoo 1893 raws li kev muaj kev muaj kev muaj kev sib tsoo rau kev sib tsoo log thiab tsheb kauj vab. Txog ib nrab ntawm lub xyoo pua 20, SIC WAF WAFER USES GREAR kom suav nrog LED tshuab. Txij thaum ntawd los, nws tau nthuav mus rau ntau cov ntawv thov semiconductor vim nws lub zog lub cev zoo. Cov khoom no muaj pom zoo nyob rau hauv nws cov kev siv dav hauv thiab sab nraud lub semiconductor kev lag luam. Nrog Moore txoj cai tshwm sim kom ncav cuag nws qhov kev txwv, ntau lub tuam txhab hauv cov kev lag luam semiconduct yog nrhiav ntawm silicon carbide li cov khoom siv semiconductor ntawm lub neej tom ntej. Sic tuaj yeem tsim kev siv ntau lub polytypes ntawm sic, txawm hais tias nyob rau hauv lub semiconductor kev lag luam, feem ntau substrates yog 4H-Sic, nrog 6H-sic ntau dua li sic kev ua lag luam tau loj hlob. Thaum hais txog 4h- thiab 6h- silicon carbide, lub h sawv cev tus qauv ntawm lub crystal ntxaij. Tus lej no sawv cev rau cov khoom sib kawm ntawm cov atoms hauv cov qauv crystal, qhov no tau piav qhia hauv SVM cov phiaj xwm hauv qab no. Qhov zoo ntawm silicon carbide hardness muaj ntau ntau qhov zoo rau kev siv Silicon Carbide tshaj li cov khoom sib dhos ntxiv. Ib qho ntawm cov txiaj ntsig zoo ntawm cov khoom siv no yog nws lub hardness. Qhov no muab cov khoom siv ntau qhov zoo, hauv kev kub ceev, kub thiab / lossis cov ntawv thov siab. Silicon carbide wafers muaj siab thermal conductivity, uas txhais tau tias lawv tuaj yeem hloov cua sov los ntawm ib qho zoo. Qhov no txhim kho nws cov hluav taws xob kev ua haujlwm thiab thaum kawg miniaturization, ib qho ntawm cov hom phiaj ntawm hloov mus rau Sic Wafers. Thermal muaj peev xwm sic substrates kuj muaj cov coefficient rau thermal expansion. Thermal nthuav dav yog tus nqi thiab kev taw qhia cov khoom nthuav dav lossis ntawv cog lus raws li nws tau ua kom sov lossis txias. Cov lus qhia nquag tshaj plaws yog dej khov, txawm hais tias nws coj tus cwj pwm txawv ntawm feem ntau ntawm cov hlau, nthuav dav thiab shrinking thaum nws ua kom sov. Silicon carbon carbon carlicient rau thermal expansion txhais tau tias nws yog zoo meej rau kev haum me me thiab ntim ntau trantors mus rau ib nti. Lwm qhov loj dua ntawm cov substrates no yog lawv lub siab tsis kam rau kev poob siab. Qhov no txhais tau tias lawv muaj peev xwm hloov qhov kub sai yam tsis muaj kev tawg lossis tawg. Qhov no tsim kom muaj cov khoom siv meej meej thaum nws yog lwm yam kev ua kom nruj dua rau lub neej thiab kev ua tau zoo ntawm silicon carbide hauv kev sib piv rau cov khoom silicon. Nyob rau sab saum toj ntawm nws lub peev xwm thermal, nws yog ib lub zog ruaj khov thiab tsis hnov qab cov kua qaub, alkalis lossis colltis lossis molten salts ntawm kub txog 800 ° C. Qhov no muab cov khoom siv rau cov versatility rau hauv lawv daim ntawv thov thiab pab lawv muaj peev xwm ua tau kom ua ntau yam kev siv. Nws lub zog ntawm kev kub siab kuj tso cai rau nws kom muaj kev nyab xeeb ua haujlwm ntawm qhov kub tshaj 1600 ° C. Qhov no ua rau nws tsim nyog substrate rau cov ntawv thov kub siab.
Lub sij hawm ncua: Jul-09-2019