Hauv cov tshuab lithography rau kev tsim cov chips, qhov tsis pom qhov yuam kev tuaj yeem rhuav tshem wafers muaj nqis ntau lab daus las. Txhua lub micrometer ntawm kev hloov pauv ntawm no yog qhov tseem ceeb rau kev ua tiav lossis tsis ua tiav ntawm nanoscale circuits, thiab cov tub ntxhais uas txhawb nqa qhov kev ua las voos no yog peb tus neeg ua yeeb yam niaj hnub no:silicon carbide ceramic khoom- nws zoo li lub zog ruaj khov nyob hauv lub ntiaj teb microscopic, tiv thaiv lub neej kev ua haujlwm ntawm kev lag luam niaj hnub semiconductor hauv qhov chaw huab cua.
1 、 Thaum Ceramics ntsib Chips: Qhov kawg sib tw hauv qhov tseeb
Lub precision ceramic Cheebtsam ntawm lithography tshuab yuav tsum tau ua peb lub luag hauj lwm ib txhij:
Ultra ruaj khov puag: tiv taus ntau tons ntawm lub siab thaum lub sijhawm raug tab sis tseem tsis muaj zog.
Kub sentinel: tswj thermal stability nyob rau hauv siab thermal shock ntawm laser.
Nqus Tus Saib Xyuas: tuav atomic qib flatness rau kaum xyoo nyob rau hauv ib puag ncig xoom vibration.
Cov khoom siv hlau niaj hnub yuav tsim "micro tremors" vim thermal expansion thiab contraction, thaum cov ntaub ntawv polymer nyuaj los tiv thaiv plasma corrosion. Silicon carbide ceramics, nrog rau lawv cov qauv siv lead ua tshwj xeeb, ua tiav qhov sib npaug zoo tshaj plaws hauv hardness, thermal conductivity, thiab deformation kuj, ua rau lawv xaiv saum toj kawg nkaus rau cov khoom tseem ceeb ntawm lithography tshuab.
2, Nano qib precision 'tsis pom lub cev tiv thaiv'
Hauv cov tshuab lithography sab saum toj xws li ASML hauv Netherlands, NIKON thiab CANON hauv Nyij Pooj, silicon carbide ceramics tau ntsiag to rov sau cov cai ntawm precision manufacturing:
Mask theem: nqa lub photomask muaj nuj nqis ntau npaum li kub, tswj cov qib nanometer qhov tseeb qhov tseeb thaum lub zog ceev.
Reflective mirror substrate: Qhov saum npoo roughness yog qhov me me, txawm tias smoother dua li daim iav nto.
Lub tshuab nqus tsev vacuum: Tom qab kaum xyoo ntawm kev siv, qhov deformation tsawg dua ib txhiab ntawm tib neeg cov plaub hau
Qhov no yuav luag 'tiv thaiv kev nkag siab' kev ruaj ntseg yog los ntawm peb lub noob ntawm cov khoom siv silicon carbide:
1. Lub coefficient ntawm thermal expansion mus zero: yuav luag "lub hnub nyoog khov" los ntawm -150 ℃ to 500 ℃
2. Peb lub sij hawm nyuaj tshaj li cov hlau: resistant rau microscopic puas los ntawm particle bombardment
3. Cov yam ntxwv ntawm tus kheej lubrication: Ua kom tsis muaj roj tsis muaj kev sib kis hauv lub tshuab nqus tsev
3, Lub 'tsim kiv puag ncig' hauv kev lag luam semiconductor
Raws li cov txheej txheem tsim chip nkag mus rau 2-nanometer era, silicon carbide ceramics tau tawg los ntawm ntau qhov kev txwv:
Dual worktable: tso cai rau ob lub tshuab ua kom tiav "atomic theem relay" nyob rau hauv lub tshuab nqus tsev.
EUV kho qhov muag txoj kev system: resistant mus tas li bombardment ntawm 13.5nm huab ultraviolet lub teeb.
Multi axis linkage system: ua tiav 200 nanoscale cov kauj ruam hauv ib ob yam tsis muaj qhov ua yuam kev.
Ib lub tshuab lithography R & D pab pawg tau ua qhov kev sim sib piv: tom qab siv lub tshuab silicon carbide ceramic workpiece theem, qhov system tso qhov tseeb tau raug txhim kho los ntawm 40%, thiab cov khoom siv tu lub voj voog tau txuas ntxiv los ntawm 3 lub hlis mus rau 2 xyoos. Qhov kev hloov pauv no tsis tsuas yog txo cov nqi tsim khoom ntawm cov chips, tab sis kuj coj qhov raug ntawm "Suav chips" mus rau qhov ua ntej ntawm cov qauv thoob ntiaj teb thawj zaug.
4 、 Txoj kev nce toj ntawm chav kuaj mus rau industrialization
Manufacturing lithography qib silicon carbide ceramics zoo li tsim lub 'flawless palace' nyob rau hauv lub ntiaj teb microscopic:
Raw khoom purity: Ultra ntshiab silicon carbide hmoov, ntau txhiab zaus purer dua ntsev noj.
Cov txheej txheem sintering: meej tswj kev loj hlob siv lead ua ntawm qhov kub thiab txias.
Precision machining siv pob zeb diamond txiav cov cuab yeej rau sub micron qib carving yuav siv sij hawm ntau npaum li kev coj noj coj ua.
Nws yog qhov kev sib tw ob ntawm "cov khoom siv science + precision manufacturing" uas tau ua cov ntaub ntawv txiav, uas yog ib zaug txwv rau kev lag luam aerospace thiab tub rog, tam sim no dhau los ua cov khoom tseem ceeb txhawb kev vam meej digital.
Nyob rau hauv niaj hnub chip manufacturing txheej txheem, uas tau mus txog lub cev txwv, silicon carbide ceramics ua pov thawj nrog nws "zero compromise" yam ntxwv uas tseeb precision tsis yog stacking ntawm cov ntaub ntawv, tab sis qhov kawg tswj ntawm lub ntsiab ntawm cov ntaub ntawv. Thaum txhua yam khoom siv ceramic ua cov lus cog tseg ntawm ntau lab tus nanoscale txav, qhov peb pom tsis yog tsuas yog kev hloov pauv ntawm cov khoom siv semiconductor, tab sis kuj yog kev txiav txim siab ntawm ib lub teb chaws txoj kev lag luam kom txav mus rau qhov siab tshaj plaws.
Post lub sij hawm: Apr-03-2025