ʻIke ʻole ʻia o ka Micro World: Pehea ʻo Silicon Carbide Ceramics e paʻa i ka piko o ka pololei i ka hana ʻana i nā chip.

I nā mīkini lithography no ka hana ʻana i ka chip, hiki i kahi hewa ʻike ʻole ke luku i nā wafers i waiwai ʻia he miliona miliona. ʻO kēlā me kēia micrometer o ka neʻe ʻana ma aneʻi he mea koʻikoʻi ia i ka kūleʻa a i ʻole ka hemahema o nā kaapuni nanoscale, a ʻo ke kumu nui e kākoʻo ana i kēia hula pololei ʻo kā mākou protagonist i kēia lā:mea silika carbide keramika- ua like ia me ka ikaika hoʻokūpaʻa i loko o ka honua microscopic, e kiaʻi ana i ke ola pololei o ka ʻoihana semiconductor hou i nā kaiapuni koʻikoʻi.
1、 I ka wā e hui ai nā Ceramics i nā ʻāpana: He Paʻi Loa loa i ka Pono
Pono nā ʻāpana seramika pololei o nā mīkini lithography e pāʻani i ʻekolu hana i ka manawa like:
Ke kumu paʻa loa: kū i nā tona o ke kaomi i ka manawa o ka hoʻolaha ʻana akā ʻaʻole mau ka neʻe.
ʻO ka wela wela: mālama i ke kūpaʻa wela ma lalo o ka haʻalulu wela kiʻekiʻe o ka laser.
Mākaʻikaʻi kiaʻi: mālama i ka palahalaha pae atomika no ʻumi makahiki i loko o kahi ʻano haʻalulu ʻole.
ʻO nā mea metala kuʻuna e hoʻopuka i nā "micro tremors" ma muli o ka hoʻonui ʻana i ka wela a me ka ʻoki ʻana, ʻoiai paʻakikī nā mea polymer e pale aku i ka ʻino plasma. ʻO nā seramika Silicon carbide, me kā lākou ʻano aniani ʻokoʻa, e hoʻokō i kahi kaulike kūpono i ka paʻakikī, ka conductivity thermal, a me ke kūpaʻa deformation, e hoʻolilo iā lākou i koho kiʻekiʻe no nā mea nui o nā mīkini lithography.
2、 Nano pae pololei 'ike 'ike kino kia'i'
Ma nā mīkini lithography kiʻekiʻe e like me ASML ma Netherlands, NIKON a me CANON ma Iapana, ke kākau mālie nei nā silicon carbide ceramics i nā lula o ka hana pololei.
ʻO ke kahua pale: e lawe ana i kahi photomask e like me ke gula, e mālama ana i ka pololei o ka pae nanometer ma ka neʻe ʻana o ka wikiwiki.
ʻO ke pani aniani hoʻohālikelike: He liʻiliʻi loa ka ʻili o ka ʻili, ʻoi aku ka maʻalahi ma mua o ka ʻili aniani.
ʻO ke keʻena vacuum: Ma hope o ʻumi makahiki o ka hoʻohana ʻana, ʻoi aku ka liʻiliʻi o ka deformation ma mua o hoʻokahi tausani o ka lauoho kanaka
ʻO kēia ʻano paʻa 'anti common sense' mai nā genes triple o nā mea silicon carbide:
1. ʻO ke koena o ka hoʻonui wela e pili ana i ka zero: kokoke i ka "makahiki hau" mai -150 ℃ a 500 ℃
2. ʻEkolu manawa ʻoi aku ka paʻakikī ma mua o ke kila: kūpaʻa i ka pōʻino microscopic i hana ʻia e ka pōʻino ʻāpana
3. Nā hiʻohiʻona lubrication ponoʻī: Loaʻa i ka hoʻouna pololei ʻole ʻana i ka aila i loko o kahi kaiapuni
3、 ʻO ka 'silent revolution' i ka ʻoihana semiconductor
Ke komo nei ke kaʻina hana chip i ka manawa 2-nanometer, ke haki nei nā seramika silicon carbide i nā palena ʻē aʻe:
ʻElua papa hana: hiki i nā ʻōnaehana ʻelua ke hoʻopau i ka "relay level atomic" i loko o kahi kaʻawale.
Pūnaehana ala opua EUV: kū'ē i ka pōʻino mau o 13.5nm kukui ultraviolet.
Pūnaehana hoʻopili axis nui: e loaʻa ana i nā ʻanuʻu nanoscale 200 i kēlā me kēia kekona me ka ʻole o ka hoʻokumu ʻana i nā hewa kumulative.
Ua alakaʻi kekahi hui R&D mīkini lithography i nā hoʻokolohua hoʻohālikelike: ma hope o ka hoʻohana ʻana i kahi papa hana hana silicon carbide ceramic, ua hoʻomaikaʻi ʻia ka pololei o ka ʻōnaehana e 40%, a ua hoʻonui ʻia ka pōʻai mālama pono mai 3 mahina a 2 mau makahiki. ʻAʻole kēia hoʻololi e hōʻemi wale i ke kumukūʻai hana o nā chips, akā lawe pū i ka pololei o ka hana ʻana o "Chinese chips" i mua o nā kūlana honua no ka manawa mua.

4、 ʻO ke ala piʻi mai ka hale hana a hiki i ka ʻoihana
ʻO ka hana ʻana i ka lithography grade silicon carbide ceramics ua like ia me ke kūkulu ʻana i kahi 'hale hala ʻole' i ka honua microscopic.
ʻO ka maʻemaʻe maʻemaʻe: ʻoi aku ka maʻemaʻe silicon carbide pauda, ​​ʻoi aku ka maʻemaʻe ma mua o ka paʻakai ʻai.
Ke kaʻina hana Sintering: ka mana pololei o ke kuhikuhi ʻana i ka ulu ʻana o ke aniani ma nā wela kiʻekiʻe.
ʻO ka mīkini pololei me ka hoʻohana ʻana i nā mea hana ʻoki daimana no ke kālai kiʻekiʻe micron ʻoi aku ka nui o ka manawa e like me ka hoʻihoʻi ʻana i ka moʻomeheu.
ʻO kēia ka holomua ʻelua o ka "material science + precision manufacturing" i hana i nā mea ʻokiʻoki, kahi i kaupalena ʻia i nā ʻoihana aerospace a me nā pūʻali koa, i kēia manawa ua lilo i mau mea nui e kākoʻo ana i ka civilization digital.
I kēia mau lā hana chip manufacturing kaʻina hana, i hiki i ka physical palena, silicon carbide ceramics hōʻoia me kona "zero compromise" mau 'ano o ka 'oiaʻiʻo precision 'aʻole ka hoʻopaʻa 'ikepili, akā, ka hope mana ma luna o ke kumu o nā mea. Ke lawe nei kēlā me kēia ʻāpana seramika i ka ʻōlelo hoʻohiki o nā miliona o nā neʻe nanoscale, ʻo ka mea a mākou e ʻike nei ʻaʻole wale ka ulu ʻana o nā lako semiconductor, akā ʻo ka hoʻoholo ʻana o ka ʻoihana aupuni e neʻe i ka piko o ka pololei.