A cikin injunan lithography don kera guntu, kuskuren da ba a iya gani zai iya lalata wafers na miliyoyin daloli. Kowane micrometer na ƙaura a nan yana da mahimmanci ga nasara ko gazawar da'irori na nanoscale, kuma jigon da ke goyan bayan wannan raye-rayen daidaitaccen raye-rayen mu ne a yau:siliki carbide yumbu abu- yana kama da ƙarfin ƙarfafawa a cikin duniyar da ba a iya gani ba, yana kiyaye madaidaicin rayuwar masana'antar semiconductor na zamani a cikin matsanancin yanayi.
1. Lokacin da Ceramics Haɗu da Chips: Ƙalubale na Ƙarshe a Daidaitawa
Madaidaicin abubuwan yumbu na injin lithography suna buƙatar taka rawa guda uku a lokaci guda:
Matsakaicin tsayayyen tushe: yana jure tann matsa lamba da yawa a lokacin fallasa amma ya kasance mara motsi.
Sentinel zafin jiki: yana kula da kwanciyar hankali na zafi a ƙarƙashin babban girgizar zafi na Laser.
Vacuum Guardian: yana kula da daidaita matakin atomic na tsawon shekaru goma a cikin yanayin girgiza sifiri.
Abubuwan ƙarfe na al'ada za su haifar da "masu girgizar ƙasa" saboda haɓakar thermal da haɓaka, yayin da kayan polymer ke da wahala don tsayayya da lalatawar plasma. Silicon carbide yumbura, tare da tsarin su na musamman na kristal, suna samun ingantacciyar ma'auni a cikin taurin, zafin zafi, da juriya na lalacewa, yana mai da su babban zaɓi don ainihin abubuwan injunan lithography.
2, Nano matakin daidai' ganuwa mai tsaron gida'
A cikin manyan injunan lithography kamar ASML a Netherlands, NIKON da CANON a Japan, yumbu na silicon carbide suna sake rubuta ƙa'idodin masana'anta a hankali:
Matakin abin rufe fuska: ɗauke da mashin hoto mai daraja kamar gwal, kiyaye daidaiton matakin nanometer yayin motsi mai sauri.
Rubutun madubi mai jujjuyawa: Tsaurin saman yana da ƙanƙanta, har ma ya fi santsi fiye da saman madubi.
Vacuum chamber: Bayan shekaru goma ana amfani da shi, nakasar ba ta kai kashi dubu ɗaya na gashin ɗan adam ba
Wannan kusan 'anti gama gari' kwanciyar hankali ya samo asali ne daga nau'ikan nau'ikan nau'ikan nau'ikan silicon carbide guda uku:
1. The coefficient na thermal fadada kusanci sifili: kusan "daskararre shekaru" daga -150 ℃ zuwa 500 ℃
2. Sau uku wuya fiye da karfe: mai jurewa ga lalacewar da ba a iya gani ba ta hanyar bama-bamai
3. Halayen lubrication na kai: Samun daidaitaccen watsa mai ba tare da mai ba a cikin yanayi mara kyau
3. The 'silent juyin juya hali' a cikin semiconductor masana'antu
Yayin da tsarin kera guntu ya shiga zamanin 2-nanometer, yumbu na silicon carbide yana karya ta ƙarin iyakoki:
Dual worktable: damar da tsarin biyu don kammala "atomic matakin gudun ba da sanda" a cikin injin daskarewa.
Tsarin hanya na gani na EUV: mai jurewa ci gaba da bama-bamai na 13.5nm matsananciyar hasken ultraviolet.
Tsarin haɗin axis da yawa: cimma matakan nanoscale 200 a sakan daya ba tare da samar da kurakurai masu tarin yawa ba.
Wani injin lithography R&D tawagar sun gudanar da kwatancen gwaje-gwaje: bayan amfani da wani silicon carbide yumbu workpiece mataki, da tsarin sakawa daidaito da aka inganta da 40%, da kuma kayan aiki sake zagayowar an tsawaita daga watanni 3 zuwa 2 shekaru. Wannan canjin ba kawai yana rage farashin samar da kwakwalwan kwamfuta ba, har ma yana kawo daidaiton masana'anta na "chips na kasar Sin" a kan gaba a matsayin kasa da kasa a karon farko.
4. Hanyar hawa daga dakin gwaje-gwaje zuwa masana'antu
Kera kayan lithography na siliki carbide yumbu kamar gina gidan sarauta ne mara aibi' a cikin duniyar da ba a iya gani ba:
Tsaftataccen kayan abu: Ultra tsantsar siliki carbide foda, sau dubunnan tsarki fiye da gishiri mai ci.
Sintering tsari: daidai iko da crystal girma shugabanci a high yanayin zafi.
Daidaitaccen mashin ɗin ta amfani da kayan aikin yankan lu'u-lu'u don sassaƙa matakin ƙananan micron yana ɗaukar lokaci mai yawa kamar maido da kayan al'adu.
Wannan ci gaba biyu ne na "kimiyya na kimiya + ainihin masana'anta" wanda ya sanya kayan yankan-baki, waɗanda aka taɓa iyakance ga masana'antar sararin samaniya da na soja, yanzu sun zama mahimman abubuwan da ke tallafawa wayewar dijital.
A cikin tsarin kera guntu na yau, wanda ya kai iyakar jiki, yumbu na silicon carbide ya tabbatar da halayensa na “sifili” cewa daidaito na gaskiya ba shine tattara bayanai ba, amma babban iko akan ainihin kayan. Lokacin da kowane ɓangaren yumbu ya ɗauki alkawarin miliyoyin motsi na nanoscale, abin da muke gani ba kawai juyin halittar kayan aikin semiconductor bane, har ma da ƙudurin masana'antar al'umma don matsawa zuwa kololuwar daidaito.
Lokacin aikawa: Afrilu-03-2025